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產(chǎn)品名稱 |
高純鈦靶材(靶坯) |
生產(chǎn)工藝 |
軋制、精加工 |
生產(chǎn)基地 |
寧波創(chuàng)潤基地 |
產(chǎn)品規(guī)格 |
根據(jù)客戶圖紙加工 |
產(chǎn)品包裝 |
木盒子 |
起訂量 |
1件 |
應(yīng)用領(lǐng)域 |
半導(dǎo)體 |
項(xiàng)目 |
3N |
3N5 |
4N |
4N5 |
5N |
5N5 |
單位 |
檢測方法 |
總純度 |
≥99.9 |
≥99.95 |
≥99.99 |
≥99.995 |
≥99.999 |
≥99.9995 |
%?[wt] |
? |
Ag |
- |
- |
1 |
0.5 |
0.01 |
0.01 |
ppm [wt] |
GDMS |
Al |
- |
50 |
10 |
3 |
2 |
2 |
ppm [wt] |
GDMS |
As |
- |
- |
10 |
1 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Au |
- |
- |
1 |
0.5 |
0.25 |
0.25 |
ppm [wt] |
GDMS |
B |
- |
1 |
- |
0.1 |
0.05 |
0.05 |
ppm [wt] |
GDMS |
Be |
- |
- |
- |
0.5 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Bi |
- |
- |
- |
0.1 |
0.05 |
0.05 |
ppm [wt] |
GDMS |
Ca |
- |
- |
1 |
1 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Cd |
- |
- |
- |
1 |
0.2 |
0.2 |
ppm [wt] |
GDMS |
Cl |
600 |
10 |
5 |
1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Co |
- |
- |
5 |
1 |
0.05 |
0.05 |
ppm [wt] |
GDMS |
Cr |
- |
20 |
5 |
1 |
0.8 |
0.8 |
ppm [wt] |
GDMS |
Cu |
- |
50 |
5 |
2 |
1 |
1 |
ppm [wt] |
GDMS |
F |
- |
- |
- |
15 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Fe |
700 |
200 |
10 |
7 |
5 |
3 |
ppm [wt] |
GDMS |
Hg |
- |
- |
- |
0.5 |
0.5 |
0.1 |
ppm [wt] |
GDMS |
K |
- |
0.1 |
0.1 |
0.05 |
0.05 |
0.01 |
ppm [wt] |
GDMS |
Li |
- |
0.1 |
0.1 |
0.05 |
0.05 |
0.005 |
ppm [wt] |
GDMS |
Mg |
- |
1 |
2 |
1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Mn |
- |
10 |
5 |
1 |
1 |
0.5 |
ppm [wt] |
GDMS |
Mo |
- |
- |
4 |
1 |
0.05 |
0.05 |
ppm [wt] |
GDMS |
Na |
- |
- |
0.2 |
0.03 |
0.03 |
0.03 |
ppm [wt] |
GDMS |
Ni |
250 |
25 |
5 |
1 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
P |
- |
- |
- |
1 |
0.25 |
0.01 |
ppm [wt] |
GDMS |
Pb |
- |
- |
- |
1 |
0.1 |
0.01 |
ppm [wt] |
GDMS |
Pd |
- |
- |
- |
0.1 |
0.1 |
0.01 |
ppm [wt] |
GDMS |
S |
- |
- |
10 |
10 |
5 |
3 |
ppm [wt] |
GDMS |
Sb |
- |
- |
7 |
0.5 |
0.5 |
0.05 |
ppm [wt] |
GDMS |
Si |
200 |
50 |
5 |
2 |
1 |
1 |
ppm [wt] |
GDMS |
Sn |
- |
- |
5 |
1 |
0.5 |
0.01 |
ppm [wt] |
GDMS |
Te |
- |
- |
- |
0.5 |
0.5 |
0.05 |
ppm [wt] |
GDMS |
Th |
- |
0.001 |
0.001 |
0.0005 |
0.0001 |
0.0001 |
ppm [wt] |
GDMS |
U |
- |
0.001 |
0.001 |
0.0005 |
0.0001 |
0.0001 |
ppm [wt] |
GDMS |
V |
- |
- |
- |
1 |
1 |
1 |
ppm [wt] |
GDMS |
W |
- |
- |
- |
1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Zn |
- |
- |
5 |
1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Zr |
- |
- |
5 |
3 |
1 |
1 |
ppm [wt] |
GDMS |
Ba |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Br |
- |
- |
- |
0.5 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Ce |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Cs |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Ga |
- |
- |
- |
0.5 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Ge |
- |
- |
- |
0.5 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Hf |
- |
- |
- |
1 |
1 |
1 |
ppm [wt] |
GDMS |
I |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
In |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
La |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Pt |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Re |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Rh |
- |
- |
- |
0.2 |
0.2 |
0.2 |
ppm [wt] |
GDMS |
Ru |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Sc |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Se |
- |
- |
- |
0.5 |
0.5 |
0.5 |
ppm [wt] |
GDMS |
Pr |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Nd |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Sm |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Eu |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Gd |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Tb |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Dy |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Ho |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Er |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Tm |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Yb |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Lu |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Os |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Ir |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Pt |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
Tl |
- |
- |
- |
0.1 |
0.1 |
0.1 |
ppm [wt] |
GDMS |
C |
200 |
150 |
50 |
30 |
30 |
30 |
ppm [wt] |
LECO |
H |
50 |
10 |
5 |
10 |
6 |
6 |
ppm [wt] |
LECO |
N |
200 |
100 |
50 |
30 |
30 |
30 |
ppm [wt] |
LECO |
O |
800 |
700 |
450 |
300 |
200 |
100 |
ppm [wt] |
LECO |
高純金屬靶材,PVD鍍膜,CVD鍍膜,薄膜濺射靶材